Silicon Nitride

Versatile and Robust

Silicon Nitride offers exceptional properties like high thermal stability, excellent insulating characteristics, and robust mechanical strength, making it indispensable in various applications.

Nitride is a great choice for building membranes, cantilever beams, and other mechanical structures.

  • Stoichiometric LPCVD Nitride
  • Low-Stress LPCVD Nitride
  • Super Low-Stress LPCVD Nitride
  • Targeted Film Stress
  • LPCVD Nitride
  • PECVD Nitride
  • Low Temp PECVD Nitride
  • Low-Stress PECVD Nitride
  • PECVD Silicon Oxynitride
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LPCVD Nitride

We offer several variations to meet your needs: stoichiometric LPCVD nitride is effective as an insulator, and low-stress LPCVD nitride is effective as a hard mask during KOH etching. Whichever nitride film you choose, you can count on robust high-quality film. We deliver engineered low-stress and super low-stress LPCVD nitride for deposition up to 2µm in thickness without cracking or peeling. We’re able to process substrate diameters: 50.8mm, 76.2mm, 100mm, 125mm, 150mm, and 200mm.

Stoichiometric Film Stress => 800 MPa Tensile
Low-Stress Film Stress <250 MPa Tensile Super
Low-Stress Film Stress <100 MPa Tensile

PECVD Nitride

Widely used in MEMS and semiconductor processing, PECVD nitride is a tensile stress film that you can use as a passivation layer or help balance film stress within a stack. If you need a nitride film that stays within lower temperature ranges (200C-375C), our PECVD nitride is a superb option. Film thickness up to 2um on substrate diameters: 50.8mm, 76.2mm, 100mm, 125mm, 150mm, 200mm, 300mm.

PECVD Nitride
Low Temp PECVD Nitride
Low-Stress PECVD Nitride <250 MPa Tensile
Low Temp Low-Stress PECVD Nitride

PECVD Silicon Oxynitride (SiON)

PECVD SiON is a mechanically stable film with optical properties that make it ideal for integrated circuits. It features a refractive index or film stress in a made-to-order recipe that meets your process requirements. Film thickness up to 4µm on substrate diameters: 50.8mm, 76.2mm, 100mm, 125mm, 150mm, 200mm, 300mm.

Targeted Refractive Index SiON
Targeted Film Stress SiON

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